Abstract
We present the micromachined GaN-on-Si μLED optoelectrodes with neuron-sized LEDs monolithically integrated on a thin narrow silicon shank for optical stimulation and electrical recording in a behaving animal. The fabricated μLEDs show an optical power of 1.9 μW at 4 V from a small size of 15 μm × 10 μm with a peak plug efficiency of 0.6 %. This allows high spatial and temporal resolution optogenetic studies from the μLED array in a small pitch of 60 μm along with the integrated recording electrodes in 20-μm pitch. Stimulation artifacts were significantly mitigated by two-metal-layer shielding topology. In vivo validation of the fabricated optoelectrode confirmed the successful light-induced modulation of neuronal activities in hippocampus with square optical pulses of 100-ms duration.
Original language | English |
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Title of host publication | 2016 IEEE International Electron Devices Meeting, IEDM 2016 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 26.5.1-26.5.4 |
ISBN (Electronic) | 9781509039012 |
DOIs | |
State | Published - 31 Jan 2017 |
Externally published | Yes |
Event | 62nd IEEE International Electron Devices Meeting, IEDM 2016 - San Francisco, United States Duration: 3 Dec 2016 → 7 Dec 2016 |
Publication series
Name | Technical Digest - International Electron Devices Meeting, IEDM |
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ISSN (Print) | 0163-1918 |
Conference
Conference | 62nd IEEE International Electron Devices Meeting, IEDM 2016 |
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Country/Territory | United States |
City | San Francisco |
Period | 3/12/16 → 7/12/16 |
Bibliographical note
Publisher Copyright:© 2016 IEEE.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering
- Materials Chemistry