GaN-on-Si μlED optoelectrodes for high-spatiotemporal-accuracy optogenetics in freely behaving animals

K. Kim, D. English, S. McKenzie, F. Wu, E. Stark, J. Seymour, P. C. Ku, K. Wise, G. Buzsaki, E. Yoon

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We present the micromachined GaN-on-Si μLED optoelectrodes with neuron-sized LEDs monolithically integrated on a thin narrow silicon shank for optical stimulation and electrical recording in a behaving animal. The fabricated μLEDs show an optical power of 1.9 μW at 4 V from a small size of 15 μm × 10 μm with a peak plug efficiency of 0.6 %. This allows high spatial and temporal resolution optogenetic studies from the μLED array in a small pitch of 60 μm along with the integrated recording electrodes in 20-μm pitch. Stimulation artifacts were significantly mitigated by two-metal-layer shielding topology. In vivo validation of the fabricated optoelectrode confirmed the successful light-induced modulation of neuronal activities in hippocampus with square optical pulses of 100-ms duration.

Original languageEnglish
Title of host publication2016 IEEE International Electron Devices Meeting, IEDM 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages26.5.1-26.5.4
ISBN (Electronic)9781509039012
DOIs
StatePublished - 31 Jan 2017
Externally publishedYes
Event62nd IEEE International Electron Devices Meeting, IEDM 2016 - San Francisco, United States
Duration: 3 Dec 20167 Dec 2016

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918

Conference

Conference62nd IEEE International Electron Devices Meeting, IEDM 2016
Country/TerritoryUnited States
CitySan Francisco
Period3/12/167/12/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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